摘要
This paper presented the theoretical model of backscattered electron emission BEE, and the universal formulas for some parameters such as η(h, Epo, Z) and f(x, Epo, Z) at Epo = 20–100 keV were deduced, respectively; where Epo is the incident energy of primary electron, f(x, Epo, Z) is maximum penetration depth distribution of emitted backscattered electron BE from atomic number Z bulk metals penetrated by primary electrons at Epo, x is the distance from incident surface to the position where primary electrons are reflected back, η(h, Epo, Z) is the backscattering coefficient at Epo of Z metal films with film thickness h. From the deduced universal formula for η(h, Epo, Z) and the relationships among the parameters of BEE from Au, W, Ag and Mo, the special formulas for some parameters such as η(h, Epo, Z) and f(x, Epo, Z) of W and Mo were also obtained and proved correct, respectively.