光学
材料科学
光刻
激光器
电子束光刻
激光阈值
光电子学
栅栏
平版印刷术
干涉光刻
分布反馈激光器
光子集成电路
半导体激光器理论
制作
光子学
波长
抵抗
物理
纳米技术
病理
替代医学
医学
图层(电子)
作者
Jingsi Li,Julian Cheng
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2013-10-30
卷期号:21 (22): 26936-26936
被引量:8
摘要
We report the first laterally-coupled distributed feedback (LC-DFB) laser with a quarter-wave equivalent phase shift (EPS) realized by interference lithography (IL) and conventional photolithography. A specially designed sampled grating is fabricated on both sidewalls of a ridge waveguide to provide a quarter-wave EPS at the center of the cavity. The resulting laser exhibits stable single-mode lasing operation over a wide range of injection currents, with a side mode suppression ratio (SMSR) of 41.1 dB. This provides a practical, low-cost method to fabricate quarter-wave phase shifted DFB lasers with high performance without any epitaxial regrowth or the use of electron-beam lithography, thereby simplifying the fabrication of DFB lasers with stable and precise wavelengths, as single devices or as arrays in photonic integrated circuits.
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