Effect of post-pattern annealing on the grain structure and reliability of Al-based interconnects

退火(玻璃) 电迁移 材料科学 合金 粒度 复合材料 冶金
作者
Seung H. Kang,C. Kim,J. W. Morris,François Y. Génin
出处
期刊:Journal of Applied Physics [American Institute of Physics]
卷期号:79 (11): 8330-8335 被引量:14
标识
DOI:10.1063/1.362545
摘要

The possibility is addressed of improving the electromigration resistance of Al and Al–Cu thin-film conductors with ‘‘quasi-bamboo’’ structures by post-pattern anneals that decrease the maximum polygranular segment length. Pure Al, Al–2Cu, and Al–2Cu–1Si lines were patterned and annealed at temperatures high enough to stimulate grain growth. Appropriate anneals led to predominantly bamboo structures with short polygranular segments. These grain structures had a high median time to failure with a relatively low deviation of the time to failure. Metallographic analyses showed that polygranular segment length was a dominant factor in determining the failure site. Post-pattern annealing promotes a preferential shortening of the relatively long polygranular segments that cause early failures. However, even after annealing, failure occurred at the longest residual polygranular segments, even when these were significantly shorter than the ‘‘Blech length’’ under the test conditions. Statistical analysis of the failure of alloy lines revealed a simple exponential relation between the failure time and the longest polygranular segment length within a line, which is functionally identical to that previously found for lines tested in the as-patterned condition.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
852应助英俊的小恐龙采纳,获得10
1秒前
缓慢平蓝发布了新的文献求助10
1秒前
1秒前
3秒前
魏少爷发布了新的文献求助10
4秒前
4秒前
5秒前
安戈完成签到,获得积分10
5秒前
动听的笑南完成签到,获得积分10
5秒前
6秒前
6秒前
周运来发布了新的文献求助30
6秒前
面壁思过应助hhcai采纳,获得10
7秒前
自觉的向日葵完成签到,获得积分10
7秒前
木木发布了新的文献求助10
8秒前
9秒前
orixero应助木子采纳,获得10
11秒前
11秒前
热情凝云发布了新的文献求助10
12秒前
澡雪发布了新的文献求助10
12秒前
12秒前
13秒前
我爱看文献是假的完成签到,获得积分10
14秒前
14秒前
诚心的不斜完成签到,获得积分20
15秒前
lizzie关注了科研通微信公众号
15秒前
积极香菇完成签到,获得积分10
15秒前
16秒前
mmmm完成签到,获得积分20
16秒前
Cope发布了新的文献求助10
17秒前
啊啊发布了新的文献求助10
17秒前
桐桐应助华健采纳,获得10
18秒前
19秒前
英姑应助缓慢平蓝采纳,获得10
19秒前
19秒前
19秒前
汉堡包应助111采纳,获得10
20秒前
感动的念文关注了科研通微信公众号
21秒前
田様应助实验顺顺利利采纳,获得10
22秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3975755
求助须知:如何正确求助?哪些是违规求助? 3520108
关于积分的说明 11200829
捐赠科研通 3256492
什么是DOI,文献DOI怎么找? 1798298
邀请新用户注册赠送积分活动 877509
科研通“疑难数据库(出版商)”最低求助积分说明 806403