已入深夜,您辛苦了!由于当前在线用户较少,发布求助请尽量完整的填写文献信息,科研通机器人24小时在线,伴您度过漫漫科研夜!祝你早点完成任务,早点休息,好梦!

A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor

光学 材料科学 镜面反射 波长 反射率 折射率 双向反射分布函数 光电子学 物理
作者
Junfeng Bai,Jingwen Li,Li Wang,Qian Zhou,Kai Ni,Xinghui Li
出处
期刊:Optics and Lasers in Engineering [Elsevier]
卷期号:154: 107019-107019 被引量:13
标识
DOI:10.1016/j.optlaseng.2022.107019
摘要

A chromatic confocal sensor is modified to measure the spectral reflectance of nontransparent surfaces or transparent thin films. According to the Fresnel formula, specular reflectance depends on the wavelength, refractive indexes of the media around the reflecting interface, angle of incidence, and also the thickness of (thin) films. To provide a constant angle of incidence, a suitably designed annular aperture is installed in the dispersion probe. In this way, it is possible to generate a conic incident beam onto the reflecting interface. Furthermore, a self-reference method is used to acquire the reflected spectrum using a continuous scan across the dispersion range. Then, the spectral reflectance is calculated based on a comparison with a standard mirror with known spectral reflectance. The experimental results show a reflectance measurement error of about ±0.05 within the spectral range from 445 nm to 645 nm. Furthermore, the thicknesses of several silicon-dioxide films on silicon substrates were determined by fitting the measured spectral reflectance with the theoretical spectral reflectance. The repeatability of the measurement is within about 0.6 nm, and the results agree with the ellipsometry and commercial film thickness gauge. When the scan speed is set to 0.05 mm/s, 0.1 mm/s, 0.2 mm/s, and 0.4 mm/s, the measured thicknesses change slightly (<0.22 nm), which means there is still a significant potential to enhance the measurement efficiency. Finally, the film thickness topography is obtained to determine the uniformity of the film. Overall, the proposed method has a big potential for the measurement of spectral reflectance and film thickness.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
CodeCraft应助mai采纳,获得10
刚刚
刚刚
刚刚
刚刚
1秒前
ice完成签到 ,获得积分10
2秒前
4秒前
wgcheng发布了新的文献求助10
5秒前
无语的稀发布了新的文献求助10
5秒前
zhanghua完成签到,获得积分10
6秒前
了0完成签到 ,获得积分10
6秒前
内向连碧发布了新的文献求助10
9秒前
Star发布了新的文献求助10
9秒前
10秒前
zhanghua发布了新的文献求助10
10秒前
小二郎应助Lii采纳,获得10
11秒前
ppg123应助21采纳,获得10
11秒前
13秒前
14秒前
nxett完成签到,获得积分10
15秒前
yao发布了新的文献求助10
15秒前
16秒前
安详向薇完成签到,获得积分10
16秒前
18秒前
Orange应助nxett采纳,获得10
18秒前
Owen应助哇哈哈采纳,获得10
19秒前
ANNNNN发布了新的文献求助10
20秒前
嗯哼应助my采纳,获得20
20秒前
大模型应助Star采纳,获得10
21秒前
adiu发布了新的文献求助10
21秒前
大模型应助美好黑猫采纳,获得10
24秒前
忧郁的寻冬完成签到,获得积分10
27秒前
28秒前
林云夕完成签到,获得积分10
30秒前
叶子阳完成签到 ,获得积分10
30秒前
33秒前
水shui完成签到,获得积分10
34秒前
哇哈哈发布了新的文献求助10
34秒前
bkagyin应助北极光采纳,获得20
36秒前
YYY666发布了新的文献求助10
38秒前
高分求助中
The late Devonian Standard Conodont Zonation 2000
Nickel superalloy market size, share, growth, trends, and forecast 2023-2030 2000
The Lali Section: An Excellent Reference Section for Upper - Devonian in South China 1500
Very-high-order BVD Schemes Using β-variable THINC Method 870
Mantiden: Faszinierende Lauerjäger Faszinierende Lauerjäger 800
PraxisRatgeber: Mantiden: Faszinierende Lauerjäger 800
A new species of Coccus (Homoptera: Coccoidea) from Malawi 500
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3256703
求助须知:如何正确求助?哪些是违规求助? 2898812
关于积分的说明 8302592
捐赠科研通 2568036
什么是DOI,文献DOI怎么找? 1394855
科研通“疑难数据库(出版商)”最低求助积分说明 652913
邀请新用户注册赠送积分活动 630631