极端紫外线
等离子体
激光器
极紫外光刻
辐射
紫外线
材料科学
光学
物理
X射线
光电子学
原子物理学
电离
波长
作者
J. M. Bridges,Christopher L. Cromer,T. J. McIlrath
摘要
XUV radiation from a laser-produced plasma was investigated using a 1.5 m grazing incidence monochromator with a channel electron multiplier array detector. This instrument provides relatively high spectral resolution as well as linear response over a large dynamic range. Spectra from 8 to 40 nm were obtained from plasmas generated by a 0.5 J Nd:YAG laser focused on the following different target materials: Al, Cu, Fe, Sn, Sm, Hf, Yb, W, and Pb. Reproducibility of emission and effects of laser energy and focus on the output were measured.
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