Research on the generation mechanism of surface and subsurface damage in loose abrasive lapping of RB-SiC ceramics

Reaction-bonded silicon carbide ceramics (RB-SiC) are extensively utilized in aerospace, space optics, and other fields due to their superior physical and chemical properties. Loose abrasive lapping plays a crucial role in the optical manufacturing of large-diameter RB-SiC mirrors. Previous research predominantly focused on grinding processes and overlooked the removal mechanism during lapping and their impact on surface and subsurface damage. In this study, a three-body brittle fracture removal model was established to explore the removal mechanisms of RB-SiC. Additionally, experiments were carried out to investigate the influence of abrasive particle size on the surface and subsurface damage. Experimental results confirm the theoretical model and indicate that for RB-SiC, different particle sizes correspond to distinct removal mechanisms, causing abrupt changes in surface roughness, while the layer under SiC acts as a buffer against the propagation of subsurface damage. These findings help optimize the manufacturing process, improve lapping efficiency, and enhance mirror performance.