极紫外光刻
材料科学
光学
光电子学
光纤激光器
超短脉冲
极端紫外线
激光器
光子晶体光纤
高次谐波产生
放大器
二次谐波产生
能量转换效率
波长
物理
CMOS芯片
作者
James S. Feehan,J.H.V. Price,Thomas Butcher,W.S. Brocklesby,Jeremy G. Frey,David J. Richardson
标识
DOI:10.1007/s00340-016-6620-8
摘要
The development of an Yb3+-fiber-based chirped-pulse amplification system and the performance in the generation of extreme ultraviolet (EUV) radiation by high-harmonic generation is reported. The fiber laser produced 100 μJ, 350 fs output pulses with diffraction-limited beam quality at a repetition rate of 16.7 kHz. The system used commercial single-mode, polarization maintaining fiber technology. This included a 40 μm core, easily packaged, bendable final amplifier fiber in order to enable a compact system, to reduce cost, and provide reliable and environmentally stable long-term performance. The system enabled the generation of 0.4 μW of EUV at wavelengths between 27 and 80 nm with a peak at ~45 nm using xenon gas. The EUV flux of ~1011 photons per second for a driving field power of 1.67 W represents state-of-the-art generation efficiency for single-fiber amplifier CPA systems, corresponding to a maximum calculated energy conversion efficiency of 2.4 × 10−7 from the infrared to the EUV. The potential for high average power operation at increased repetition rates and further suggested technical improvements are discussed. Future applications could include coherent diffractive imaging in the EUV, and high-harmonic spectroscopy.
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