材料科学
溅射沉积
溅射
纳米技术
高功率脉冲磁控溅射
工程物理
腔磁控管
冶金
薄膜
工程类
出处
期刊:Coatings
[MDPI AG]
日期:2024-08-15
卷期号:14 (8): 1041-1041
标识
DOI:10.3390/coatings14081041
摘要
The development of advanced nanostructured thin films produced by magnetron sputtering has resulted in significant progress in materials science and engineering [...]
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