期刊:IEEE Sensors Journal [Institute of Electrical and Electronics Engineers] 日期:2023-10-16卷期号:23 (22): 26910-26924被引量:5
标识
DOI:10.1109/jsen.2023.3323318
摘要
High-temperature pressure sensors can be widely used in industries with high-temperature working conditions, such as aerospace, automotive, petroleum industry, and fire protection. Pressure sensors with excellent sensing performance and high-temperature tolerance will have broad application prospects in harsh environments. This review summarizes the research progress of high-temperature pressure sensors from aspects ranging from materials and working mechanisms to temperature compensation methods. Finally, challenges and trends in the field are briefly discussed. It is expected to benefit the scientific research community and promote further research and applications of high-temperature sensors.