移相模块
材料科学
微电子机械系统
绝缘体上的硅
包层(金属加工)
光电子学
插入损耗
栅栏
光学
波导管
硅光子学
光子学
硅
物理
冶金
作者
Haoyang Sun,Qifeng Qiao,Ji Xia,Chengkuo Lee,Guangya Zhou
出处
期刊:Optics Letters
[The Optical Society]
日期:2022-10-17
卷期号:47 (22): 5801-5801
被引量:8
摘要
Mid-infrared (MIR) photonic integrated circuits have generated considerable interest, owing to their potential applications, such as thermal imaging and biochemical sensing. A challenging area in the field is the development of reconfigurable approaches for the enhancement of on-chip functions, where a phase shifter plays an important role. Here, we demonstrate a MIR microelectromechanical system (MEMS) phase shifter by utilizing an asymmetric slot waveguide with subwavelength grating (SWG) claddings. The MEMS-enabled device can be easily integrated into a fully suspended waveguide with SWG cladding, built on a silicon-on-insulator (SOI) platform. Through engineering of the SWG design, the device achieves a maximum phase shift of 6π, with an insertion loss of 4 dB and a half-wave-voltage-length product (VπLπ) of 2.6 V·cm. Moreover, the time response of the device is measured as 13 µs (rise time) and 5 µs (fall time).
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