The Microwave Test and Measurement System for On-wafer Investigation under Irradiation

The Microwave automated test and measurement system (ATMS) for on-wafer total ionizing dose and dose rate effects investigations is described. The ATMS is based on Cascade PM5 probe station and measurement hardware providing on-wafer investigations of RF and MW ICs with operating frequencies up to 67 GHz. The ATMS is equipped with radiation sources: RIK-0401 X-Ray Source and Radon-8M Laser Source. Dosimetry of radiation sources provided by calibration researches methodologies is described. All measurement hardware and radiation sources are interconnected into single work network controlled by PC with specialized software. The ATMS is used for radiation characterization of RF ICs, IP-blocks, and test structures during an on-wafer investigation. The results of ATMS approbation during 180 nm SOI CMOS process characterization are present.