超纯水
电气化
接触带电
材料科学
聚合物
半导体
电导率
电荷
电场
表面电荷
复合材料
薄脆饼
摩擦电效应
电荷密度
化学物理
纳米技术
电
光电子学
化学
电气工程
工程类
物理
物理化学
量子力学
作者
K. Yatsuzuka,Yoshio Higashiyama,K. Asano
出处
期刊:IEEE Transactions on Industry Applications
[Institute of Electrical and Electronics Engineers]
日期:1996-01-01
卷期号:32 (4): 825-831
被引量:60
摘要
It has been thought that the conductivity of pure water is high enough to neglect the streaming electrification. However, with the recent advancement of semiconductor industries, ultrapure water appeared to cause electrification problems at the washing and the rinsing processes of semiconductor wafers. The investigation on the electrification phenomenon of polymer (PTFE) surface with ultrapure water is described in this article. Water droplets are always charged positively after sliding on the PTFE surface, and the surface potential on PTFE is mostly negative and varies along the droplet path becoming positive downstream. As the conductivity of water becomes closer to that of ideal water, the amount of droplet charge increases drastically. This electrification phenomenon is also enhanced by decreasing the thickness of the PTFE plate. It suggests that the Coulombic force between the charge on the PTFE surface and the mirror image charge is an important factor. We have proposed a model which is based on the electric double layer similar to conventional streaming electrification for insulating liquid, assuming that the charged droplet leaves the excess positive charge on the polymer surface.
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