Laser‐processed lithium niobate wafer for pyroelectric sensor

Abstract During the past few decades, pyroelectric sensors have attracted extensive attention due to their prominent features. However, their effectiveness is hindered by low electric output. In this study, the laser processed lithium niobate (LPLN) wafers are fabricated to improve the temperature–voltage response. These processed wafers are utilized to construct pyroelectric sensors as well as human–machine interfaces. The laser induces escape of oxygen and the formation of oxygen vacancies, which enhance the charge transport capability on the surface of lithium niobate (LN). Therefore, the electrodes gather an increased quantity of charges, increasing the pyroelectric voltage on the LPLN wafers to a 1.3 times higher voltage than that of LN wafers. For the human–machine interfaces, tactile information in various modes can be recognized by a sensor array and the temperature warning system operates well. Therefore, the laser modification approach is promising to enhance the performance of pyroelectric devices for applications in human–machine interfaces. image