法布里-珀罗干涉仪
分光计
小型化
红外线的
微电子机械系统
制作
材料科学
光学滤波器
计算机科学
光圈(计算机存储器)
光电子学
光学
红外光谱学
吞吐量
自适应光学
光谱学
波长
电信
纳米技术
物理
声学
病理
医学
量子力学
替代医学
无线
作者
Martin Ebermann,Norbert Neumann,Karla Hiller,M. Seifert,Marco Meinig,Steffen Kurth
摘要
Many application fields of infrared spectroscopy require small, robust and transportable spectrometers, which are considerable less costly than existing products. Therefore microspectrometer technologies are rapidly emerging and many research groups spend effort on this. Compared to other kinds of devices, micromachined tunable Fabry-Pérot filters are best suited in terms of miniaturization and optical throughput. This paper gives a review of μFP filters for infrared spectroscopy. Different approaches from several groups are compared. Optical performance parameters like wavelength tuning range, spectral resolution and aperture size as well as complexity of fabrication and costs are discussed.
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