P‐166: Tuning the Refractive Index of Silicon‐Oxynitride Films for Light‐Extraction Enhancement of OLED Devices

Adding light extraction film is an effective way to enhance the light extraction of OLEDs. By matching the index difference between OLED and resin, the thin film encapsulation (TFE) layers covering the entire surface of the top‐emission OLED device and located between OLED and resin could be functioned as the light extraction film. In this study, an approach to obtain high refractive index SiON films was investigated. We successfully achieved three gradient index changes in SiON films.The Fourie Transform Infrared (FTIR) spectra were tested to analyze the content of Si‐N and Si‐O bond in the SION films. The moisture permeability of the SiON films were also tested.