计量学
校准
忠诚
计算机科学
测量不确定度
领域(数学)
点(几何)
工作(物理)
集合(抽象数据类型)
测量仪器
系统工程
光学
机械工程
数学
工程类
统计
物理
电信
热力学
程序设计语言
纯数学
几何学
作者
Richard Leach,Han Haitjema,Rong Su,Adam Thompson
标识
DOI:10.1088/1361-6501/abb54f
摘要
Abstract In this paper, we will review the development and use of an ISO standardised framework to allow calibration of surface topography measuring instruments. We will draw on previous work to present the state of the art in the field in terms of employed methods for calibration and uncertainty estimation based on a fixed set of metrological characteristics. The resulting standards will define the metrological characteristics and present default methods and material measures for their determination—the paper will summarise this work and point out areas where there is still some work to do. An example uncertainty estimation is given for an optical topography measuring instrument, where the effect of topography fidelity is considered.
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