Review on mechanical and functional properties of refractory high-entropy alloy films by magnetron sputtering

Abstract Refractory high-entropy films (RHEFs), as multi-component materials, have garnered significant attention due to their potential use in high-temperature applications. RHEFs are endowed with unique microstructural and functional properties due to the use of refractory elements. In this review, we examine the recent state of research on RHEFs deposited by the magnetron sputtering technique. The microstructure of RHEFs has been analyzed/explored and the mechanical properties as well as the main hardening mechanisms of these films are discussed. Furthermore, functional properties such as resistance to corrosion and wear, electrical and irradiation performances, and high-temperature oxidation were evaluated. RHEFs can meet market demand in the field of engineering materials. However, many challenges, such as low ductility at room temperature, remain to be overcome. This review provides an overview of the strengths and weaknesses of RHEFs produced using magnetron sputtering.