A review of gripping and manipulation techniques for micro-assembly applications

Abstract This paper provides a review of micro-assembly-related research activities and their findings. The assembly of micro-devices involves handling of parts that are extremely small (in the order of 10−6 m). Part designs, which are complex in shape and require the use of material of varying properties, cannot be manufactured using Micro-Electro Mechanical Systems (MEMS) technology; in such situations, assembly of micron-sized parts is necessary. Gripping techniques using micro-grippers and other manipulation/assembly tools are needed to accomplish micro-assembly tasks. The literature reviewed in this paper includes micro-gripping techniques and manipulation strategies, integrated micro-assembly systems design and implementation as well as computer-based approaches to aid in micro-assembly applications. Keywords: Micro-assemblyMicro-devicesMicronMicro-grippersManipulationRobots Acknowledgements Funding for the completion of the research review activities were obtained from the National Science Foundation (NSF grant No. 0230709) and from Sandia National Laboratories (SNL). Their assistance is gratefully acknowledged.