Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process

抛光 化学机械平面化 X射线光电子能谱 材料科学 氧化物 污染 化学键 粘附 化学工程 化学状态 无机化学 冶金 化学 复合材料 有机化学 工程类 生物 生态学
作者
Kwang-Min Han,Sung Hee Han,Samrina Sahir,Nagendra Prasad Yerriboina,Tae-Gon Kim,Niraj Mahadev,Jin-Goo Park
出处
期刊:ECS Journal of Solid State Science and Technology [Institute of Physics]
卷期号:9 (12): 124004-124004 被引量:16
标识
DOI:10.1149/2162-8777/abcf13
摘要

The contamination behavior of ceria particles (50 and 100 nm) with oxide surfaces at pH 4 and 8 was studied using dipping and polishing conditions. Higher contamination at pH 4 than pH 8 was observed for dipping cases. In contrast, pH 8 conditions produced higher contamination than pH 4 for polishing cases. The difference in the contamination between dipping and polishing could be attributed to electrostatic attraction and chemical bonding. During polishing, weak or no chemical bonding may occur at pH 4, whereas the Ce–O–Si bond may form due to the surface charges of ceria and silica at pH 8. XPS analysis revealed that strong additional peaks related to Ce–O–Si bonding were detected for O 1s spectra at a binding energy of around 532 eV for surfaces polished at pH 8. Similar results were observed for 50 nm as well as 100 nm ceria particles. Based on the results, we concluded that ceria particles would have different adhesion behaviors for dipping and polishing at the same pH value. Also, higher ceria adhesion was observed at higher pH compared to lower pH during the CMP process, which was correlated to strong Ce–O–Si chemical bond formation due to the CMP conditions.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
2秒前
3秒前
思源应助瓶盖采纳,获得10
5秒前
疑问发布了新的文献求助10
7秒前
8秒前
yx_cheng应助马旭辉采纳,获得10
10秒前
霜之哀伤发布了新的文献求助20
10秒前
无限的妙菡完成签到 ,获得积分10
12秒前
南方姑娘发布了新的文献求助10
13秒前
13秒前
美丽的依霜完成签到 ,获得积分10
14秒前
14秒前
科研通AI5应助唠叨的严青采纳,获得10
15秒前
威武皮带完成签到,获得积分10
17秒前
11发布了新的文献求助10
19秒前
Rondab应助马旭辉采纳,获得10
20秒前
辰昜完成签到 ,获得积分10
23秒前
26秒前
桐桐应助11采纳,获得10
27秒前
阿纯完成签到,获得积分10
28秒前
南方姑娘完成签到,获得积分10
28秒前
李爱国应助何征结采纳,获得10
29秒前
不安静白完成签到 ,获得积分20
32秒前
wanci应助科研通管家采纳,获得10
32秒前
李健应助科研通管家采纳,获得10
32秒前
天天快乐应助科研通管家采纳,获得10
32秒前
香蕉觅云应助科研通管家采纳,获得10
32秒前
深情安青应助科研通管家采纳,获得10
32秒前
Lc应助科研通管家采纳,获得10
32秒前
Lc应助科研通管家采纳,获得10
32秒前
完美世界应助科研通管家采纳,获得10
33秒前
Owen应助nananan采纳,获得10
33秒前
脑洞疼应助科研通管家采纳,获得10
33秒前
33秒前
33秒前
33秒前
34秒前
34秒前
万能图书馆应助霜之哀伤采纳,获得30
35秒前
高分求助中
The Mother of All Tableaux: Order, Equivalence, and Geometry in the Large-scale Structure of Optimality Theory 3000
A new approach to the extrapolation of accelerated life test data 1000
Indomethacinのヒトにおける経皮吸収 400
基于可调谐半导体激光吸收光谱技术泄漏气体检测系统的研究 370
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
Robot-supported joining of reinforcement textiles with one-sided sewing heads 320
Aktuelle Entwicklungen in der linguistischen Forschung 300
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3993004
求助须知:如何正确求助?哪些是违规求助? 3533831
关于积分的说明 11263946
捐赠科研通 3273597
什么是DOI,文献DOI怎么找? 1806129
邀请新用户注册赠送积分活动 882968
科研通“疑难数据库(出版商)”最低求助积分说明 809629