谐振器
谐振器耦合系数
材料科学
反射器(摄影)
声学
反射系数
机电耦合系数
光学
反射(计算机编程)
光电子学
物理
压电
计算机科学
程序设计语言
光源
作者
Jicong Zhao,Zexin Sun,Dong Zhi,Yanmeng Dang,Shitao Lv,Wenhao Ye,Haiyan Sun,Quan Shi
标识
DOI:10.1016/j.mejo.2024.106105
摘要
In this paper, the impact of the resonant cavity and lateral acoustic edge reflector on the performance of the S0 mode Lamb-wave resonators based on Aluminum nitride film doped with scandium concentration of 9.5 % (AlSc0.095N) were systematically studied. Through the theoretical analysis and experimental verification, we found that the Q value of the resonator can be improved by defining a miniaturized resonant cavity due to the enhanced acoustic reflection effect at the anchor boundary. The effect of lateral reflection boundary width on the spurious modes, Q values, and electromechanical coupling coefficient (k2eff) of the resonators was analyzed. In addition, the k2eff and Q values of the interdigitated transducer (IDT)-IDT resonators are higher than those of the IDT-Floating resonators, due to the larger electromechanical conversion efficiency and smaller interface loss. The experimental results show that the Q and k2eff values of the optimized IDT-Floating and IDT-IDT resonators reach 853, 1.70 % and 1362, 2.69 %, respectively, meanwhile, they have clean spectrums.
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