Microstructural parameters estimation for sputtered Al coating via SEM, EDS, X-ray diffraction line broadening and EBSD

Aluminum (Al) coatings were deposited on Zr-4 alloy substrate by magnetron sputtering. The microstructure parameters of the as-deposited coating were characterized by means of scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and electron backscattered scattering detection (EBSD). The results showed that: via the SEM and EDS, it can be found that Al atoms and Zr atoms undergo rapid interdiffusion at the interface, forming an Al-Zr diffusion layer with a thickness of about 1.5 μm; via X-ray diffraction line broadening, the estimated crystal size was 81.53 nm and the as-deposited Al coating presences lattice tensile strain; via EBSD, the fraction of HAGBs is overwhelmingly larger than that of LAGBs and the mean grain size is 0.55 μm, also, the Al coating exhibits the (100)<001> texture.