Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d31, d33, d15), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tgδ). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material-piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1-4.3 microns and the capacitance of the actuator is about 12 nF.