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420 积分
2023-09-08 加入
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Gallol-Based Block Copolymer with a High Flory–Huggins Interaction Parameter for Next-Generation Lithography
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Area-Selective Molecular Layer Deposition of Alucone on Photoresist for Enhanced Pattern Transfer
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Directed Self-Assembly by Sparsely Prepatterned Substrates with Self-Responsive Polymer Brushes
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Machine Learning Models and Dimensionality Reduction for Prediction of Polymer Properties
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Study of submicron-resolution, high-accuracy overlay and large-field lithography for advanced packaging
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Evaluation of line-edge/line-width roughness of directed self-assembled PS-b-PMMA patterns using coarse-grained molecular dynamics simulation
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Dry development for a directed self-assembly lithography hole-shrink process using CO / H 2 plasma
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A scalable integration process for ultrafast two-dimensional flash memory
8个月前
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