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Critical Level of Nitrogen Incorporation in Silicon Oxynitride Films: Transition of Structure and Properties, toward Enhanced Anticorrosion Performance
4个月前
已完结
Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma
4个月前
已完结
Infrared study of the structure of silicon oxynitride films produced by plasma enhanced chemical vapor deposition
4个月前
已完结
The effect of gas composition on the properties of silicon oxynitride thin film prepared by low-pressure inductively coupled Ar/N2 plasma
4个月前
已完结
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