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20 积分 2022-09-15 加入
New oxide nanoparticle extreme-UV photoresists achieve high sensitivity
1天前
已完结
EUV metal oxide hybrid photoresists: ultra-small structures for high-resolution patterning
4天前
已完结
Development of an inorganic photoresist for DUV, EUV, and electron beam imaging
4天前
已完结
Elucidating the patterning mechanism of zirconium-based hybrid photoresists
4天前
已完结
Investigation of novel inorganic resist materials for EUV lithography
5天前
已完结
Towards environmentally friendly processing of ionic liquid-based photoresists with a boosted lithography performance
6个月前
已完结
Photo‐Crosslinkable Inorganic/Organic Sulfur Polymers
6个月前
已完结
Balancing sensitivity and resolution by feedback regulation of free radicals from Sn-C bonds in tin-oxygen clusters EBL photoresist
6个月前
已完结
Fluoro-substituted DPP-bisthiophene conjugated polymer with azides in the side chains as ambipolar semiconductor and photoresist
6个月前
已完结
Fluorine-Rich Zinc Oxoclusters as Extreme Ultraviolet Photoresists: Chemical Reactions and Lithography Performance
7个月前
已完结
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