脉冲激光沉积
汽化
沉积(地质)
激光器
物理
化学气相沉积
薄膜
分子束外延
光电子学
激光汽化
纳米技术
光学
外延
材料科学
古生物学
沉积物
生物
热力学
图层(电子)
作者
P. R. Willmott,J. Robert Huber
标识
DOI:10.1103/revmodphys.72.315
摘要
Photons have many advantages for vaporizing condensed systems, and laser vaporization sources have a flexibility not available with other methods. These sources are applied to making thin films in the well-known technique of pulsed laser deposition (PLD). The vaporized material may be further processed through a pulsed secondary gas, lending the source additional degrees of freedom. Such pulsed-gas sources have long been exploited for fundamental studies, and they are very promising for film deposition, as an alternative to chemical vapor deposition or molecular beam epitaxy. The authors outline the fundamental physics involved and go on to discuss recent experimental findings.
科研通智能强力驱动
Strongly Powered by AbleSci AI