X射线光电子能谱
铌
电解抛光
材料科学
蚀刻(微加工)
兴奋剂
分析化学(期刊)
超导射频
氮气
氮化铌
各向同性腐蚀
氮化物
纳米技术
化学
冶金
化学工程
梁(结构)
光电子学
光学
粒子加速器
电极
环境化学
有机化学
物理化学
工程类
物理
电解质
图层(电子)
作者
Ziqin Yang,Xiangyang Lu,Weiwei Tan,Jifei Zhao,Deyu Yang,Yujia Yang,Yuan He,Kui Zhou
标识
DOI:10.1016/j.apsusc.2017.12.214
摘要
Nitrogen doping study on niobium (Nb) samples used for the fabrication of superconducting radio frequency (SRF) cavities was carried out. The samples' surface treatment was attempted to replicate that of the Nb SRF cavities, which includes heavy electropolishing (EP), nitrogen doping and the subsequent EP with different amounts of material removal. The surface chemical composition of Nb samples with different post treatments has been studied by XPS. The chemical composition of Nb, O, C and N was presented before and after Gas Cluster Ion Beam (GCIB) etching. No signals of poorly superconducting nitrides NbNx was found on the surface of any doped Nb sample with the 2/6 recipe before GCIB etching. However, in the depth range greater than 30 nm, the content of N element is below the XPS detection precision scope even for the Nb sample directly after nitrogen doping treatment with the 2/6 recipe.
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