X射线光电子能谱
碲化镉光电
材料科学
蚀刻(微加工)
碲
溴
元素分析
化学
各向同性腐蚀
光电子学
化学反应
物理化学
分析化学(期刊)
钝化
无机化学
化学工程
有机化学
生物化学
图层(电子)
色谱法
工程类
作者
Min Yung Lee,Yong Soo Lee,Hee Chul Lee
摘要
Calculated chemical equations using thermodynamics suggest that elemental Te0 is easily induced during bromine-based etching process on the HgCdTe surface and the induced elemental Te0 can be removed by chemical reaction with hydrazine, forming volatile H2Te. X-ray photoelectron spectroscopy (XPS) confirmed these chemical reactions. The induced elemental Te0 is believed to play a role as surface generation-recombination centers in CdTe∕HgCdTe interface, which was confirmed by XPS, ideality factor, and energy-dispersive interface trap density (Dit) analyses.
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