GaN/AlGaN avalanche photodiode detector technology for high performance ultraviolet sensing applications

Detection of ultraviolet (UV) bands offers increased spatial resolution, small pixel sizes, and large format arrays, thus benefitting a variety of NASA, defense, and commercial applications. Al_xGa_1-xN semiconductor alloys, which have attracted much interest for detection in the UV spectral region, have been shown to enable high optical gains, high sensitivities with the potential for single-photon detection, and low dark current performance in ultraviolet avalanche photodiodes (UV-APDs). We are developing GaN/AlGaN UV-APDs with large pixel sizes that demonstrate consistent and uniform device performance and operation. These UV-APDs are fabricated through high quality metal organic chemical vapor deposition (MOCVD) growth on lattice-matched, low dislocation density GaN substrates with optimized material growth and doping parameters. The use of these low defect density substrates is a critical element to realizing highly sensitive UV-APDs and arrays with suppressed dark current and jitter under high electric fields. Optical gains of 5×10⁶ and greater with enhanced quantum efficiencies over the 320-400 nm spectral range have been demonstrated, enabled by a strong avalanche multiplication process. We are additionally using device technology developed for high voltage GaN p-i-n rectifier devices to enable advanced Geiger-mode UVAPDs with single-photon counting capability. This technology provides extremely low leakage currents in the reverse bias range near avalanche breakdown, a necessary requirement for stable Geiger-mode operation. The variable-area GaN/AlGaN UV-APD detectors and arrays being developed enable advanced sensing performance over UV bands of interest with high resolution detection for NASA Earth Science applications.