计算机科学
可靠性(半导体)
机器人学
系统工程
透视图(图形)
人工智能
工程类
机器人
物理
功率(物理)
量子力学
作者
Yong Yang,Meirong Zhao,Yinguo Huang,Hong Zhang,Ning Guo,Yelong Zheng
标识
DOI:10.1088/1361-6501/ac83e1
摘要
Abstract Micro-force measurement with high resolution, accuracy, and reliability is of interest in a broad range of applications including gravitational-wave detection, intelligent healthcare, bionic robotics, and micromanipulation. Herein, the researchand development in recent years of micro-force sensors based on various principles is reviewed thoroughly, presenting their characteristics and applications, as well as summarizing their advantages and limitations. The most indispensable component of force sensors, elastic sensitive elements, is underlined. Next, four kinds of not widely used but promising sensors are also introduced briefly. Finally, the traceable reference forces are analyzed, concluding with a future perspective into the corresponding challenges and opportunities of micro-force sensors for future research. This review aims at providing references for developing micro-force sensors and improving their performance.
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