Mechanism of thermal decomposition of silanes

Data on the mechanism of thermal decomposition of silanes are generalised. The main stages of the process are distinguished and characterised. Attention is concentrated on the elementary homogeneous reactions, deposition of silicon from the gas phase and formation of aerosols. Various models of formation of aerosols are considered. The results of theoretical and experimental investigations of this process are discussed. Data on the chemical composition of the solid product of silane pyrolysis (wall deposit and aerosol particles) are presented. It is noted that the hydrogen content in the solid product varies over wide limits. The bibliography includes 211 references.