法布里-珀罗干涉仪
光纤
光力学
干涉测量
光学
光纤传感器
材料科学
天文干涉仪
光电子学
物理
波长
谐振器
作者
Chen Zhu,Hongkun Zheng,Lingmei Ma,Zheyi Yao,Bo Liu,Jie Huang,Yunjiang Rao
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2023-02-17
卷期号:23 (7): 6406-6426
被引量:46
标识
DOI:10.1109/jsen.2023.3244820
摘要
Fabry–Perot interferometers (FPIs) have found a multitude of scientific and industrial applications ranging from gravitational wave detection, high-resolution spectroscopy, and optical filters to quantum optomechanics. Integrated with optical fiber waveguide technology, the fiber-optic FPIs have emerged as a unique candidate for high-sensitivity sensing and have undergone tremendous growth and advancement in the past two decades with their successful applications in an expansive range of fields. The extrinsic cavity-based devices, i.e., the fiber-optic extrinsic FPIs (EFPIs), enable great flexibility in the design of the sensitive Fabry–Perot cavity combined with state-of-the-art micromachining and conventional mechanical fabrication, leading to the development of a diverse array of EFPI sensors targeting at different physical quantities. Here, we summarize the recent progress of fiber-optic EFPI sensors, providing an overview of different physical and mechanical sensors based on the FPI principle, with a special focus on displacement-related quantities, such as strain, force, tilt, vibration and acceleration, pressure, and acoustic. The working principle and signal demodulation methods are shown in brief. Perspectives on further advancement of EFPI sensing technologies are also discussed.
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