欧姆接触
肖特基势垒
材料科学
光电子学
制作
量子隧道
肖特基二极管
金属半导体结
带隙
半导体
接触电阻
锡
纳米技术
凝聚态物理
图层(电子)
二极管
冶金
物理
医学
病理
替代医学
作者
Zhonghan Cao,Fanrong Lin,Gong Gu,Hao Chen,Jens Martin
摘要
The semiconductor MoS2 has attracted much attention owing to its sizable energy bandgap, significant spin–orbit coupling, and quantum effects such as the valley Hall effect and gate-induced superconductivity. However, in electronic devices, the energy bandgap usually gives rise to the formation of Schottky barriers at the interface to the contact metal, which may render devices intended for quantum transport inapplicable at low temperature. Therefore, the fabrication of Ohmic contacts operational at low temperature is crucial. Yet, it currently remains a substantial challenge to produce low resistive contacts with a simple process. We manifest that low temperature Ohmic contacts to mono- and few-layer MoS2 can be achieved with Tin (Sn) as the contact metal. Sn is directly evaporated onto MoS2, and hence, this establishes a much easier fabrication method than tunneling barriers, for example. We provide detailed device characterization, extract Schottky barrier heights, demonstrate multiterminal measurements, and propose a possible explanation: strain induced deformation of MoS2 imposed by Sn.
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