Flexible transparent array capacitive sensor based on pyramid structure

In the era of the Internet of everything, 5G is on the way out, and the demand of various terminal devices for sensors is increasing, but at present, the commercial sensors on the market are mainly made of rigid materials.Therefore, flexible and transparent sensors are rare in certain situations (such as human wearable devices).Therefore, it is an ideal choice for wearable electronic products to develop a flexible and transparent pressure sensor with high sensitivity, quick response, wide range of production and simple process.Based on the photolithography process, we successfully manufactured a flexible transparent capacitance sensor with a pyramid structure based on nickel electrode /PDMS sandwich structure.Although the biomimetic structure reported in other literature or the folded microstructure generated by tensile PDMS can also be used to improve sensitivity, it does not have graphic controllability and affects mass production. Compared with this, the lithography process has incomparable benefits.The production process is standardized, and the graphic control can be controlled, and the unified and standardized production can be carried out in large area and large quantity.And as far as we know, the nickel electrode capacitive pressure sensor was reported for the first time.Its flexibility and transparency are better than ITO electrodes currently on the market.Simple process, low price and easy to manufacture in large format.Compared with the pure PDMS dielectric layer with planar structure, the pyramid microstructure sensor has higher sensitivity, lower detection limit, good stability and durability.The mechanism of enhanced sensing for pyramid microstructure is also discussed.Therefore, the developed pressure sensor has a great application prospect in the field of electronic skin.