Nanoporous Nitrogen‐Doped Titanium Dioxide with Excellent Photocatalytic Activity under Visible Light Irradiation Produced by Molecular Layer Deposition

Ultrathin films: A new molecular layer deposition process for the synthesis of nanoporous nitrogen-doped titanium dioxide films is developed. This process is based on a four-step ABCB reaction sequence using TiCl4, ethanolamine, and malonyl chloride as precursors (see picture). The obtained nanoporous N-doped TiO2 exhibits excellent photocatalytic activity upon irradiation with visible light. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.