Nonlinear error full-field compensation method for phase measuring profilometry

光学 轮廓仪 绝对相位 查阅表格 谐波 非线性系统 观测误差 相(物质) 结构光三维扫描仪 计算机科学 算法 数学 物理 相位噪声 扫描仪 统计 电压 量子力学 表面粗糙度 程序设计语言
作者
Cai Xu,Yiping Cao,Wenjuan Cai,Haitao Wu,Hongmei Li,Hechen Zhang,Haihua An
出处
期刊:Applied Optics [Optica Publishing Group]
卷期号:61 (32): 9360-9360 被引量:11
标识
DOI:10.1364/ao.470733
摘要

Phase measuring profilometry (PMP) has the highest measuring accuracy among structured light projection-based three-dimensional (3D) sensing methods. Due to their low-cost and high-resolution features, commercial projectors are extensively used in PMP, but they are all designed with a gamma effect purpose that considers the characteristics of human vision. Affected by the gamma effect, a set of phase-shifting sinusoidal deformed patterns captured in PMP may contain high-order harmonics which lead to nonlinear phase errors. Then, a novel nonlinear error full-field compensation method is proposed. First, the unwrapped phases modulated by the reference plane are measured several times, and their average phase is taken as the measured phase modulated by the reference plane to eliminate random errors as much as possible. Second, an expected phase plane is fitted from this average phase with the least-squares method. Third, the nonlinear phase error can be detected by subtracting the fitted expected phase from this average phase. Finally, the full-field look-up table (LUT) can be established between the nonlinear phase error and the measured phase. When an object is measured, the unwrapped phase modulated by the object is taken as the measured phase of the LUT, so the corresponding nonlinear phase error can be directly searched in the LUT. In this way, the full-field nonlinear phase error can be efficiently compensated. Experimental results show the feasibility and validity of the proposed method. The mean absolute error (MAE) can be improved from 0.48 mm to 0.06 mm, and the root mean square error (RMSE) can be improved from 0.55 mm to 0.07 mm.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
烂漫臻发布了新的文献求助10
刚刚
1秒前
andy发布了新的文献求助30
2秒前
科研通AI5应助wss采纳,获得10
3秒前
科研小白发布了新的文献求助10
3秒前
Jasper应助花开半夏采纳,获得10
3秒前
4秒前
5秒前
叶雨思空发布了新的文献求助10
5秒前
Frozen完成签到,获得积分10
5秒前
5秒前
6秒前
科研通AI5应助LF-Scie采纳,获得10
7秒前
单薄的靳发布了新的文献求助50
7秒前
紫禁城的雪花完成签到,获得积分10
7秒前
Luciferhnnn完成签到,获得积分10
7秒前
8秒前
diedeline完成签到 ,获得积分10
8秒前
9秒前
Lysong发布了新的文献求助20
9秒前
Cai发布了新的文献求助10
9秒前
赵辉发布了新的文献求助10
9秒前
FashionBoy应助hachii采纳,获得30
9秒前
yujie完成签到,获得积分10
10秒前
WangShIbei完成签到,获得积分10
10秒前
王欣发布了新的文献求助10
10秒前
zihi发布了新的文献求助10
11秒前
11秒前
如意寒烟完成签到,获得积分20
11秒前
12秒前
Alice完成签到,获得积分10
12秒前
Jasper应助烂漫臻采纳,获得10
14秒前
muadqwq完成签到,获得积分10
14秒前
Lucas应助wulijie采纳,获得10
14秒前
852应助口外彭于晏采纳,获得10
14秒前
lovezoe发布了新的文献求助10
15秒前
认真路灯完成签到 ,获得积分10
15秒前
15秒前
15秒前
赵辉完成签到,获得积分10
16秒前
高分求助中
【此为提示信息,请勿应助】请按要求发布求助,避免被关 20000
ISCN 2024 – An International System for Human Cytogenomic Nomenclature (2024) 3000
Continuum Thermodynamics and Material Modelling 2000
Encyclopedia of Geology (2nd Edition) 2000
105th Edition CRC Handbook of Chemistry and Physics 1600
Izeltabart tapatansine - AdisInsight 800
Maneuvering of a Damaged Navy Combatant 650
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 物理 生物化学 纳米技术 计算机科学 化学工程 内科学 复合材料 物理化学 电极 遗传学 量子力学 基因 冶金 催化作用
热门帖子
关注 科研通微信公众号,转发送积分 3774942
求助须知:如何正确求助?哪些是违规求助? 3320717
关于积分的说明 10201500
捐赠科研通 3035571
什么是DOI,文献DOI怎么找? 1665545
邀请新用户注册赠送积分活动 796995
科研通“疑难数据库(出版商)”最低求助积分说明 757683