光学
轮廓仪
绝对相位
查阅表格
谐波
非线性系统
观测误差
相(物质)
结构光三维扫描仪
计算机科学
算法
数学
物理
相位噪声
扫描仪
统计
电压
量子力学
表面粗糙度
程序设计语言
作者
Cai Xu,Yiping Cao,Wenjuan Cai,Haitao Wu,Hongmei Li,Hechen Zhang,Haihua An
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2022-10-11
卷期号:61 (32): 9360-9360
被引量:11
摘要
Phase measuring profilometry (PMP) has the highest measuring accuracy among structured light projection-based three-dimensional (3D) sensing methods. Due to their low-cost and high-resolution features, commercial projectors are extensively used in PMP, but they are all designed with a gamma effect purpose that considers the characteristics of human vision. Affected by the gamma effect, a set of phase-shifting sinusoidal deformed patterns captured in PMP may contain high-order harmonics which lead to nonlinear phase errors. Then, a novel nonlinear error full-field compensation method is proposed. First, the unwrapped phases modulated by the reference plane are measured several times, and their average phase is taken as the measured phase modulated by the reference plane to eliminate random errors as much as possible. Second, an expected phase plane is fitted from this average phase with the least-squares method. Third, the nonlinear phase error can be detected by subtracting the fitted expected phase from this average phase. Finally, the full-field look-up table (LUT) can be established between the nonlinear phase error and the measured phase. When an object is measured, the unwrapped phase modulated by the object is taken as the measured phase of the LUT, so the corresponding nonlinear phase error can be directly searched in the LUT. In this way, the full-field nonlinear phase error can be efficiently compensated. Experimental results show the feasibility and validity of the proposed method. The mean absolute error (MAE) can be improved from 0.48 mm to 0.06 mm, and the root mean square error (RMSE) can be improved from 0.55 mm to 0.07 mm.
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