Preparation and performance of AlSc alloy targets

By reactive sputtering, the AlSc alloy targets are used to manufacture the AlScN films which are the upcoming piezoelectric materials for next generation (such as 5G) RF filters, MEMS microphones, PMUT based fingerprint sensors and so on. The targets property, such as Sc content, targets preparation types, purity and oxygen concentration, has an important influence on the performance of the AlScN films. And the preparation and performance of AlSc alloy targets are discussed in this paper.