GENERAL EQUATION OF FOUR PROBES METHOD FOR RESISTIVITY MEASUREMENT OF SEMICONDUCTOR MATERIALS

The equation of four probes method for resistivity measurement requires point contacts and a definite configuration of probes array. In fact, the contacts are always with definite dimension. In this article, we drive the equations of measuring resistivity and surface sheet resistance, taking into account the contact dimension and putting the location of the four probes arbitrary. The in-line four probes and the square array four probes are two specific examples for the equations.