Machine Learning for Optical Scanning Probe Nanoscopy

Abstract The ability to perform nanometer‐scale optical imaging and spectroscopy is key to deciphering the low‐energy effects in quantum materials, as well as vibrational fingerprints in planetary and extraterrestrial particles, catalytic substances, and aqueous biological samples. These tasks can be accomplished by the scattering‐type scanning near‐field optical microscopy (s‐SNOM) technique that has recently spread to many research fields and enabled notable discoveries. Herein, it is shown that the s‐SNOM, together with scanning probe research in general, can benefit in many ways from artificial‐intelligence (AI) and machine‐learning (ML) algorithms. Augmented with AI‐ and ML‐enhanced data acquisition and analysis, scanning probe optical nanoscopy is poised to become more efficient, accurate, and intelligent.