Flexible tuned, multi-focus laser stealth dicing of JGS3 quartz glass: From algorithm to practice

Cutting of transparent materials is of great importance. In this study, JGS3 quartz glass is cut with laser stealth dicing (LSD) method. By loading computer generated hologram (CGH), a spatial light modulator (SLM) modulates a laser beam into ten coaxial beams along the depth direction. A human-in-the-loop feedback-weighted three-dimensional Gerchberg-Saxton (3D-GS) algorithm is utilized to improve its performance. The effectiveness of the algorithm is verified by CCD-captured energy distribution records. A noticeable improvement in multi-beam energy uniformity is realized. Additionally, an qualitative analysis is conducted to investigate the changes of laser beams inside the glass during LSD. Through flexible tuning of multi-focus spacing, the laser-diced surface roughness could be adjusted and optimized to ∼1 μm, paving the way for future advanced applications.