平版印刷术
纳米-
材料科学
纳米技术
半导体
氧化物
金属
光子
光电子学
光学
冶金
物理
复合材料
作者
Chun Cao,Xianmeng Xia,Xiaoming Shen,Xiaobing Wang,Zhenyao Yang,Qiulan Liu,Chenliang Ding,Dazhao Zhu,Cuifang Kuang,Xü Liu
标识
DOI:10.1038/s41467-024-52929-8
摘要
As a basic component of the versatile semiconductor devices, metal oxides play a critical role in modern electronic information industry. However, ultra-high precision nanopatterning of metal oxides often involves multi-step lithography and transfer process, which is time-consuming and costly. Here, we report a strategy, using metal-organic compounds as solid precursor photoresist for multi-photon lithography and post-sintering, to realize ultra-high precision additive manufacturing of metal oxides. As a result, we gain metal oxides including ZnO, CuO and ZrO
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