High-speed deposition of highly (001)-oriented SrCO3 films prepared using laser chemical vapor deposition

Abstract Highly (001)-oriented SrCO 3 films were prepared using laser chemical vapor deposition. The degree of (001) orientation of the SrCO 3 films increased from 60% to 100% as the deposition temperature increased from 848 to 923 K. The surface morphology of the (001)-oriented SrCO 3 film was characterized by polygonal grains with striped facets, and pyramidal grains formed on the surface. The deposition rate increased as the deposition temperature increased, and the maximum deposition rate of the highly (001)-oriented SrCO 3 film was 205 μm h −1 .