材料科学
铁电性
居里温度
热稳定性
光电子学
氮化物
极化(电化学)
钪
电容器
矫顽力
电极
纳米技术
电介质
凝聚态物理
化学工程
冶金
电气工程
铁磁性
电压
图层(电子)
化学
物理化学
工程类
物理
作者
Roberto Guido,Patrick D. Lomenzo,Md Redwanul Islam,Niklas Wolff,Maike Gremmel,Georg Schönweger,H. Kohlstedt,Lorenz Kienle,Thomas Mikolajick,Simon Fichtner,Uwe Schroeder
标识
DOI:10.1021/acsami.2c18313
摘要
The discovery of ferroelectricity in aluminum scandium nitride (Al1-xScxN) opens technological perspectives for harsh environments and space-related memory applications, considering the high-temperature stability of piezoelectricity in aluminum nitride. The ferroelectric and material properties of 100 nm-thick Al0.72Sc0.28N are studied up to 873 K, combining both electrical and in situ X-ray diffraction measurements as well as transmission electron microscopy and energy-dispersive X-ray spectroscopy. The present work demonstrates that Al0.72Sc0.28N can achieve high switching polarization and tunable coercive fields in a 375 K temperature range from room temperature up to 673 K. The degradation of the ferroelectric properties in the capacitors is observed above this temperature. Reduction of the effective top electrode area and consequent oxidation of the Al0.72Sc0.28N film are mainly responsible for this degradation. A slight variation of the Sc concentration is quantified across grain boundaries, even though its impact on the ferroelectric properties cannot be isolated from those brought by the top electrode deterioration and Al0.72Sc0.28N oxidation. The Curie temperature of Al0.72Sc0.28N is confirmed to be above 873 K, thus corroborating the promising thermal stability of this ferroelectric material. The present results further support the future adoption of Al1-xScxN in memory technologies for harsh environments like applications in space missions.
科研通智能强力驱动
Strongly Powered by AbleSci AI