Ti3C2Tx MXene-Based Micro-Supercapacitors with Ultrahigh Volumetric Energy Density for All-in-One Si-Electronics

MXene-based microsupercapacitors (MSCs) have promoted the development of on-chip energy storage for miniaturized and portable electronics due to the small size, high power density and integration density. However, restricted energy density and operating voltage invariably create obstacles to the practical application of MSCs. Here, we report a symmetric MXene-based on-chip MSC, achieving an ultrahigh energy density of 75 mWh cm-3 with high operating voltage of 1.2 V, which are almost the highest values among all reported symmetric MXene MSCs. The adjustment strategy of acetone on the viscosity and surface tension of MXene ink, along with the natural sedimentation strategy, can effectively prevent the orderly stacking of MXene sheets. Further, we developed an all-in-one Si-electronics with three series MSCs through laser-etching technology, obviously presenting high integration capacity and processing compatibility. Thus, this work will contribute to the development of high integration all-in-one electronics with high energy density MXene-based MSCs.