光学
RGB颜色模型
白光干涉法
干涉测量
干扰(通信)
计算机科学
干涉显微镜
人工智能
色差
计算机视觉
频道(广播)
职位(财务)
物理
电信
GSM演进的增强数据速率
财务
经济
作者
Tong Guo,Yue Gu,Jinping Chen,Xing Fu,Chunguang Hu
摘要
Microstructure surface topography is a key aspect of micro-nano measuring research for it has an obvious influence on the performance and quality of micro-nano devices. Scanning white light interferometry is a common method of testing surface profiling. In this paper, a color CCD camera, rather than a black-and-white CCD camera, was utilized to acquire white light interference images, which contain information of RGB channels. Based on acquired color interference images, wavelet transform method was employed to calculate phase value of corresponding channel in each scanning position. Then zero-optical-path-difference positions were accurately determined via a constructed evaluation function and least square method. Surface topography was eventually obtained via linear relationship of relative height and the zero-optical-path-difference position. The proposed method was verified by simulation and experiment of measuring standard step provided by VLSI Standards Incorporated.
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