Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Shipeng Xu, Xiaowei Li, Meidong Huang, Peiling Ke, Aiying Wang; Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films. Appl. Phys. Lett. 7 April 2014; 104 (14): 141908. https://doi.org/10.1063/1.4870968 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioApplied Physics Letters Search Advanced Search |Citation Search