光学
干扰(通信)
计量学
栅栏
干涉测量
干涉显微镜
涂层
材料科学
振幅
相(物质)
观测误差
衍射
衍射光栅
白光干涉法
物理
计算机科学
电信
纳米技术
统计
频道(广播)
量子力学
数学
作者
Tao Zhang,Tao Sun,Jiean Li,Xingyu Zhao,Jiwen Cui,Jiubin Tan
出处
期刊:Applied Optics
[The Optical Society]
日期:2020-10-23
卷期号:59 (31): 9756-9756
摘要
In this study, the effects of the coating film thickness on a grating interferometry system were analyzed. The asymmetry-induced error of the deformed phase grating varied periodically with the coating film thickness, due to the spurious interference of multiple reflections in the film layer and asymmetry in the amplitudes of the diffraction orders, which led to phase offsets (and thus position errors). The average error obtained with a multiorder interferometer was compared to that simulated by atomic force microscopy. The simulation and measurement results were consistent with the theoretical analysis, which will facilitate accurate measurement error analysis.
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