原子层沉积
材料科学
钙钛矿(结构)
能量转换效率
制作
图层(电子)
光电子学
沉积(地质)
钙钛矿太阳能电池
缓冲器(光纤)
氧化物
纳米技术
化学工程
计算机科学
冶金
古生物学
病理
工程类
替代医学
生物
电信
医学
沉积物
作者
Pravakar P. Rajbhandari,Tara P. Dhakal
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2020-03-24
卷期号:38 (3)
被引量:17
摘要
Organic materials provide a very small thermal budget for any postfabrication treatment or for a subsequent layer in a device fabrication. This demand for the low-temperature process has driven the focus of this study to obtain atomic layer deposited oxide layer at a low temperature suitable for a buffer layer in perovskite solar cells. The buffer layer will assist in blocking holes, effectively extract electrons, provide better shunt protection, and act as a sputter protection layer for organic perovskites. Three different oxide layers, Al2O3, ZnO, and TiO2, are grown at 100 °C and studied for this purpose using synchronous modulated flow draw atomic layer deposition (ALD) technology optimized in a commercial 200 mm ALD reactor from Sundew Technologies. It allows greater precursor utilization and shorter deposition cycle times that in turn reduces thermal processing time compared to traditional ALD processes. These thin films have been shown to enhance the fill factor and high charge extraction from the solar cell. Three oxides are compared on all aspects, among which ZnO (3 nm) along with Al2O3 (1 nm) on top of the perovskite layer have shown excellent performance improvement in the device’s power conversion efficiency.
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