Design and fabrication of a Piezoelectric Micro Synthetic Jet Actuator

Synthetic Jet Actuator (SJA) is a new type actuator for active flow control applications. A Piezoelectric Micro SJA based on MEMS technology was present in this work. The simulation of device performance was carried out through a multi-domain coupled analysis model, and the relative error of jet velocity between simulation results and experiment data is less than 8%. A batch fabrication process was proposed to integrated fabrication of piezoelectric film and silicon structure. And using this process, prototype of micro SJA was gained. Preliminary tests of SJA's performance show that the max synthetic jet velocity (8.2m/s) is obtained as driving voltage is 25V and driving frequency close to the first-order natural frequency (10500Hz).