A HDR 98dB <tex>$3.2\mu \mathrm{m}$</tex> Charge Domain Global Shutter CMOS Image Sensor

We developed a High Dynamic Range (HDR) Global Shutter (GS) pixel for automotive applications working in the charge domain with dual high-density storage node using Capacitive Deep Trench Isolation (CDTI). With a pixel size of 3.2μm, this is the smallest reported GS pixel achieving linear dynamic range of 98dB with a noise floor of 2.8e-. The pinned memory isolated by CDTI can store 2 × 8000e- with dark current lower than 5e-/s at 60°C. A shutter efficiency of 99.97% at 505nm and a Modulation Transfer Function (MTF) at 940nm better than 0.5 at Nyquist frequency is also reported.